Edwards iXL120 Semiconductor Dry Pump
Original price was: $23,634.00.$21,888.00Current price is: $21,888.00.
Edwards iXL120 Dry Pump
The Edwards iXL120 is a compact, low energy, 110 m3h-1 dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with extremely low energy consumption.
iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. Its low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable fab floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment!
This version operates 200-460v, MCM and has 3/8 Quick Coupling water fittings.
Inquire for lead time.
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Description
Edwards iXL120 Dry Pump
The Edwards iXL120 is a compact, low energy, 110 m3h-1 dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with extremely low energy consumption.
iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. Its low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable fab floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment!
This version operates 200-460v, MCM and has 3/8 Quick Coupling water fittings.
Inquire for lead time.
Additional information
| Weight | 129.8 lbs |
|---|
Brand
Edwards
| Peak speed | 110 m3h-1 |
| 65 cfm | |
| 1833 lmin-1 | |
| Ultimate pressure (typical) | 0.013 mbar |
| 0.009 Torr | |
| 1.3 Pa | |
| Power at ultimate | 0.55 kW |
| Power in Green Mode | 0.045 kW |
| Inlet connection | |
| Vertical | ISO63 |
| Horizontal | NW50 |
| Outlet connection | NW25 |
| Cooling water connection | Optional |
| Water flow | 1 lmin-1 |
| Weight | 59 kg |
