Ebara EBT70 Turbo Pump Package
Starting at: $4,500.00 Starting at: $3,995.00
Ebara EBT70 Turbo Pump Package
The Ebara EBT70 turbo pumps are highly efficient, cost effective solutions that provide clean and reliable vacuum generation for your high tech manufacturing requirements. The compound turbo pumps in the EBT Series can be mounted in any orientation and are ideal for mobile applications. These pumps offer high pumping speed and high-volume light gas compression, making them ideal for UHV and analytical systems. The EBT70 turbo pump package comes with an integrated controller.
All EBARA compound turbomolecular pumps are available with either water or fan cooling, and the EBT70 is available with convection cooling.
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Description
Ebara EBT70 Turbo Pump Package
The Ebara EBT70 turbo pumps are highly efficient, cost effective solutions that provide clean and reliable vacuum generation for your high tech manufacturing requirements. The compound turbo pumps in the EBT Series can be mounted in any orientation and are ideal for mobile applications. These pumps offer high pumping speed and high-volume light gas compression, making them ideal for UHV and analytical systems. The EBT70 turbo pump package comes with an integrated controller.
All EBARA compound turbomolecular pumps are available with either water or fan cooling, and the EBT70 is available with convection cooling.
Brand
Ebara
| Flange | Inlet | CF63 or ISOK63 |
| Outlet | KF16 | |
| Volume Flow Rate | N2 (L/s) | 75 |
| N2 with protective screen (L/s) | 70 | |
| H2 (L/s) | 45 | |
| Maximum Compression Ratio | N2 | 1 x 108 |
| H2 | 1 x 105 | |
| Ultimate Pressure | Torr | < 7.5 x 10-10 |
| Pa | < 1 x 10-7 | |
| Maximum Throughput | N2 (sccm) | 10 |
| N2 (Pa x L/s) | 18 | |
| Ar (sccm) | 5 | |
| Ar (Pa x L/s) | 9.2 | |
| Maximum Backing Pressure | Torr | 9 |
| Pa | 1200 | |
| Recommended Backing Pump | L/min | ≥ 25 |
| CFM | ≥ 0.8 | |
| Startup Time | min | 2.0 – 2.5 |
| Shutdown Time | min | 20.0 – 25.0 |
| Vibration Level (0 – peak) | μm | ≤ 0.2 |
| Rated Rotational Speed | min-1 | 90000 |
| Installation Position | Any | |
| Cooling System | Free Convection Air Cooling | |
| Bearing System | Grease-Lubricated Ball Bearing | |
| Permissible Ambient Temperature | Deg C | 8.0-38.0 |
| Deg F | 46-100 | |
| Major Materials | Al Alloy | |
| Weight | kg | 5 |
| lb | 11 |
