Edwards iXL120N E 200-460V 3/8 QC Water Fittings
Original price was: $27,011.00.$20,088.00Current price is: $20,088.00.
Edwards iXL120N E 200-460V 3/8 QC Water Fittings
iXL120 is a compact, low energy, 110 m3h-1 dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with extremely low energy consumption.
iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. Its low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable fab floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment!
- Description
- Additional information
- Brand
- Technical Specs
- Dimensions
- Pump Curve
Description
Edwards iXL120N E 200-460V 3/8 QC Water Fittings
iXL120 is a compact, low energy, 110 m3h-1 dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with extremely low energy consumption.
iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. Its low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable fab floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment!
Additional information
| Weight | 130 lbs |
|---|
Brand
Edwards
| Product | iXL120 |
| Peak speed | 110 m3h-1 |
| 65 cfm | |
| 1833 lmin-1 | |
| Ultimate pressure (typical) | 0.013 mbar |
| 0.009 Torr | |
| 1.3 Pa | |
| Power at ultimate | 0.55 kW |
| Power in Green Mode | 0.045 kW |
| Inlet connection | |
| Vertical | ISO63 |
| Horizontal | NW50 |
| Outlet connection | NW25 |
| Cooling water connection | Optional |
| Water flow | 1 lmin-1 |
| Weight | 59 kg |
