Edwards iGX100N Dry Pump
Original price was: $32,075.00.$22,438.00Current price is: $22,438.00.
Edwards iGX100N Dry Pump
The iGX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range. iGX dry pumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability.
iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.
- Description
- Additional information
- Brand
- Technical Specs
- Dimensions
- Pump Curve
- Applications
Description
Edwards iGX100N Dry Pump
The iGX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range. iGX dry pumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability.
iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.
Additional information
| Weight | 275 lbs |
|---|
Brand
Edwards
| Peak speed | 105 m3h-1 |
| 62 cfm | |
| 1750 l min-1 | |
| Ultimate pressure | 5.00E-03 mbar |
| 3.75E-03 Torr | |
| 0.50 Pa | |
| Power at 700 Torr exhaust | |
| Ultimate | 1 kW |
| AUC (Active Utility Controller) | 0.05 kW |
| Water inlet* | 1 slm |
| Nitrogen | 4 or 14 slm |
| Footprint excluding exhaust | 0.20 m2 |
| Weight | 120 kg |
| Inlet connection | ISO63 |
| Outlet connection | NW25 |
| Noise at ultimate | < 55 dB(A) |
- Load Lock
- Transfer
- Metrology
- Lithography
- PVD Process
- PVD Pre-Clean
- RTA
- Strip/Ashing
- Oxide Etch
- Silicon Etch
- Metal Etch
