Device handling system
Gas recovery devices
Also, the latest version “C” design incorporates increased shaft and bearing sealing performance as well as increased water handling capabilities.
Evacuation gases
Weight: 60 kg
Pumping for Electron Tube
Anest Iwata ISP Series Scroll Pumps
Evacuation Gases
Air-cooled system that eliminates installation restrictions
Accelerator, synchrotron radiation
Leak detectors
Surface modification, Electron beam process
ISP APPLICATION

Vacuum furnace, heat treatment furnace
Pumping Speed at 50 Hz: 1000 L/min | 35.3 CFM
Applications
Precaution for dry scroll vacuum pump
Outlet Connection: NW40
Precaution for dry scroll vacuum pump
Air Flush: 10 L/min
Use at ambient operation temperature in the range of 5°C to 40°C.
Anest Iwata ISP-1000 42.4 CFM Dry Scroll Vacuum Pump
The Benefits of Oil-Free Pumping are many and the Anest Iwata ISP-500 pump may be the immediate solution to oil contamination and disposal issues presented by your existing oil lubricated pumps.
Vacuum Drying only for water based
Motor Power: 1400 W
Accelerator, Synchrotron Radiation
FEATURES
The Anest Iwata oil-free scroll pump is the original scroll manufacturer. With years of field experience and more performance hours than all competitors combined, the ISP-series scroll pumps are the premium choice for clean pumping technology.
Load Locks
Improved seal design

Ambient Temperature
Ultimate Pressure: ≤ 1 Pa | ≤ 7.5 x 10-3 Torr

This pumping system is suitable for clean processes only. Do not use explosive, flammable, toxic or corrosive substances or substances which contain chemicals, solvents or particles. ANEST IWATA will not perform maintenance work on pumps which have used hazardous substances.
Sputtering equipment, Vacuum deposition equipment, Ion plating equipment
Vacuum Chuck
Leak Tightness: ≤ 1.0 x 10-5 Pa x m3/h
ISP series of vacuum pumps offer a clean vacuum environment and eliminate the nuisance of cumbersome lubricant maintenance or sealing water administration. ISP is free from installation restrictions because of its air-cooled system. ISP maintains low power consumption from atmosphere to maximum pressure. Maximum pressure is 1[Pa] High reliability

Handling Patented
Use at ambient operation temperature in the range of 5°C to 40°C.
Gas recovery devices
ANEST IWATA was the first in the world to develop the air-cooled, oil-free, scroll-type vacuum pumps. Our oil-free scroll vacuum pumps are compact and less noise/vibration emitting than other dry vacuum pumps. They are highly valued by customers who need clean, high quality vacuum, especially in analytical and semiconductor related fields.

ANEST IWATA was the first in the world to develop the air-cooled, oil-free, scroll-type vacuum pumps. Our oil-free, scroll vacuum pumps are compact and emit less noise and vibration than other dry vacuum pumps. They are highly valued by customers who need clean, high quality vacuum, especially in the analytical and semiconductor related fields.

Low noise and low vibration operation
Gas Substitution
Surface modification, Electron beam process
Vacuum Cooling

This pumping system is suitable for clean processes only. Do not use explosive, flammable, toxic or corrosive substances or substances which contain chemicals, solvents or particles. ANEST IWATA will not perform maintenance work on pumps which have used hazardous substances.

Use at ambient operation temperature in the range of 5°C to 40°C.
Oil Free, clean vacuum environment
Sputtering Systems
Application for oil-free scroll pump
Vacuum equipment

Features
Applications

Ambient Temperature
Evacuation gases

Accelerator, Synchrotron Radiation
Sputtering equipment, vacuum deposition equipment, & ion plating equipment
Ambient Operating Temperature: 10° C – 40° C | 50° F – 104° F
Vacuum furnace, Heat treatment furnace
Regenerative
Intel Connection: NW40
Vacuum Forming
Noise Level: ≤ 67 dB(A)
Helium Leak Detectors
Water Vapor Capacity: 25 g/day
Typical applications for the ISP-500 include:
Low power consumption from atmosphere to max pressure
Ceramic Industry
Specifications
The ISP-500 Pump is cool, quiet, and highly efficient due to its unique patented balanced design.

Pumping Speed at 60 Hz: 1200 L/min | 42.4 CFM
Air-Cooled
Vacuum packaging machine
The GVSU-500B scroll pump is equipped with a dry vacuum system so there is no need for lubricating oil or sealing water. The absence of gears means that it is low-maintenance and there is no need to change gear oil and no risk of lubricating oil leaks. Generator powered vacuum keeps the installation area clean. It is equipped with a water cooling system which eliminates the need to control water cooling on site. The GVSU-500B pump is excellent in displacing water vapor. Low power variance between atmospheric pressure and maximum pressure allows repeated, continuous operation between atmospheric pressure and vacuum. This pump uses up less energy and can lead to savings in the vacuum area. 24-Hour operation secured.
This pumping system is suitable for clean processes only. Do not use explosive, flammable, toxic or corrosive substances or substances which contain chemicals, solvents or particles. ANEST IWATA will not perform maintenance work on pumps which have used hazardous substances.
Precautions for Dry Scroll Vacuum Pump
Voltage: 200 V, 208 V, 230 V, 380 V, 415 V, 460 V
Cooling System: Air-Cooled
Beam Line

Deairator

Anest Iwata ISP-250C Oil-Free Dry Scroll Vacuum Pump, KF-25 Inlet, Single Phase 115/230 VAC, factory set to 200-230 VAC. Anest Iwata Part Number: ISP-250C-SV. These Anest Iwata ISP-250C oil-free dry scroll pumps operate on 1-phase, 100-115 or 200-230 VAC, 50/60 Hz, factory set to 200-230 VAC. Displacement for this Anest Iwata ISP-250C is 10.6 CFM at 60 Hz. The Anest Iwata ISP-250C is economical and inexpensive to operate, offers high performance, compact design and very light. Little routine maintenance, no oil changes, filters or foreline traps to replace. Excellent alternative to oil sealed rotary vane pumps. The part number ISP-250C-SV specifies Single-Phase (S) with vertical oriented intake flange (V). The operating instructions manual is available for down in PDF format below. APPLICATIONS Sputtering equipment, Vacuum deposition equipment, Ion plating equipment Accelerator, Synchrotron Radiation Surface modification, Electron beam process Gas recovery devices Vacuum equipment Leak detectors Device handling system Vacuum furnace, Heat treatment furnace Laboratory use Vacuum packaging machine The Anest Iwata ISP series of vacuum pumps offer a clean vacuum environment and eliminate the nuisance of cumbersome lubricant maintenance or sealing water administration. The ISP series is free from installation restrictions because of its air-cooled system. ISP vacuum pumps maintain low power consumption from atmosphere to maximum pressure.
all Anest Iwata Dry Scroll Vacuum pumps which includes the Anest Iwata Scroll Meister ISP-500 pump.
Laboratory use
Laboratory use

Vacuum furnace, Heat treatment furnace
Oil-Free
Laboratory use
Vacuum equipment
Device handling system

Description
Leak detectors
Vacuum packaging machine
Sputtering equipment, Vacuum deposition equipment, Ion plating equipment
Ambient Temperature
Surface modification, electron beam process
Improved Water
Air-Purge Circuit
Noise Level at Air-Flush: ≤ 74 dB(A)

Additional information

Brand

Anest Iwata

Anest Iwata Corporation is a Japanese manufacturer of air compressors, coating equipment and systems, vacuum pump and liquid application equipment.

Anest Iwata ISP 90 – Manual

Anest Iwata ISP 250C 500C – Manual

Anest Iwata ISP 1000 – Manual

Anest Iwata ISP Dry Scroll Pump DataSheet

Anest Iwata ISP Power Supply Cable