MKS Pirani Gauge Pic
MKS Pirani Gauge Pic

MKS Convection-Enhanced Pirani Gauge

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MKS 947 Cable Pic MKS HPS 947 Convection Enhanced Pirani Gauge Cable, 10ft

Starting at: $355.00

MKS Series 317 Convection-Enhanced Pirani Gauge

The MKS Series 317 Convection-Enhanced Pirani Vacuum Sensors are general purpose vacuum gauges for foreline pressure measurement up to 1000 Torr. They can be used in many industrial applications such as semiconductor manufacturing, load locks, leak detection, vacuum coating, and freeze dryers. Bakable and radiation-resistant versions of the 317 Convection-Enhanced Pirani Vacuum Sensor are suitable for high-energy physics applications.

  • Ideal for foreline measurement and vacuum control
  • 1.0 x 10-3 to 1000 Torr measurement range
  • Bakeable and radiation-resistant versions available
  • Low cost, rugged design

Call for lead time.

UPC: SKU: N/A Categories: , Tags: , , , , , , ,
Brand:MKS
$404.00
SKU: 103170013SH
$404.00
SKU: 103170014SH
$355.00
SKU: 103170027SH

Description

MKS Series 317 Convection-Enhanced Pirani Gauge

The MKS Series 317 Convection-Enhanced Pirani Vacuum Sensors are general purpose vacuum gauges for foreline pressure measurement up to 1000 Torr. They can be used in many industrial applications such as semiconductor manufacturing, load locks, leak detection, vacuum coating, and freeze dryers. Bakable and radiation-resistant versions of the 317 Convection-Enhanced Pirani Vacuum Sensor are suitable for high-energy physics applications.

  • Ideal for foreline measurement and vacuum control
  • 1.0 x 10-3 to 1000 Torr measurement range
  • Bakeable and radiation-resistant versions available
  • Low cost, rugged design

Call for lead time.

Additional information

Weight N/A
MKS Pirani Gauge

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Brand

MKS

MKS Instruments is a global provider of instruments, systems, subsystems and process control solutions that measure, monitor, deliver, analyze, power and control critical parameters of advanced manufacturing processes.
Type Shielded Convection-enhanced Pirani Sensor
Measurement Range 1.0 x 10-3 to 1.0 x 10+3 Torr
Set Point Range 2.0 x 10-3 – 9.5 x 10+2 Torr
Resolution 1% of indicated decade
Reproducibility 5% of indicated pressure
Operating Temperature 0 – 50°C (32 – 122°F)
Bake Out Temperature 100°C non-operating without cable and electronics
Exposed Materials 304 stainless steel, nickel 200, glass, platinum
Internal Volume 0.5 in3 (8.0 cm3) max.
Connector 9-pin D-sub
Cable Multiconductor shielded cable

MKS Pirani Gauge Dimensional Drawing